THESIS
2021
1 online resource (xiii, 121 pages) : illustrations (some color)
Abstract
Microvia filling technology becomes more important because of the increasing demand for high
density interconnects. Via can be filled with copper by electroplating with the presence of a
conductive seeding layer. The common process of forming a copper seeding layer requires steps
involving hazardous chemicals which are difficult to be treated. Another problem is that a
conductive anodic filament occurs easily with the decreasing distance between vias with a
potential difference. In this thesis study, a simple and more eco-friendly method in 5 main steps
is developed for microvia filling. The seeding layer is reduced graphene oxide based as it was
found that it can block the migration of metal ions. The parameters in copper electroplating are
optimized by changing UV reduction time, chem...[
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Microvia filling technology becomes more important because of the increasing demand for high
density interconnects. Via can be filled with copper by electroplating with the presence of a
conductive seeding layer. The common process of forming a copper seeding layer requires steps
involving hazardous chemicals which are difficult to be treated. Another problem is that a
conductive anodic filament occurs easily with the decreasing distance between vias with a
potential difference. In this thesis study, a simple and more eco-friendly method in 5 main steps
is developed for microvia filling. The seeding layer is reduced graphene oxide based as it was
found that it can block the migration of metal ions. The parameters in copper electroplating are
optimized by changing UV reduction time, chemicals added to the bath, voltage applied and
duration of electrolysis. The performance is evaluated by optical profiling, cross-section analysis and two-terminal sensing. From the results, the best-filled microvia is completed with
reducing graphene oxide under UV light for 6 hours and is electroplating for 3 hours at 7.5V. The average electrical resistance of microvia reaches 0.0851 mΩ. An economic analysis is
conducted to estimate its economic potential. With fewer steps and chemicals involved, this method is more environmentally friendly and cost-effective.
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