THESIS
2013
xv, 77 pages : illustrations (chiefly color) ; 30 cm
Abstract
Graphene, a two-dimensional single atomic layer of graphite, has emerged as a
promising material with interesting physical and chemical properties and high potential for
various applications such as sensors, transparent electrodes and electronics. Due to its high
carrier mobility, graphene has gained much interest as a possible candidate to extend beyond
silicon complementary metal-oxide-semiconductor technology for future nano-electronic
devices.
In this thesis, two different kinds of graphene field-effect transistors (G-FETs) have been
fabricated using exfoliated single-layer graphene (SLG). These two kinds of G-FETs are used
for transport measurement and capacitance measurement respectively. The electronic
properties of graphene have been investigated through measurement...[
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Graphene, a two-dimensional single atomic layer of graphite, has emerged as a
promising material with interesting physical and chemical properties and high potential for
various applications such as sensors, transparent electrodes and electronics. Due to its high
carrier mobility, graphene has gained much interest as a possible candidate to extend beyond
silicon complementary metal-oxide-semiconductor technology for future nano-electronic
devices.
In this thesis, two different kinds of graphene field-effect transistors (G-FETs) have been
fabricated using exfoliated single-layer graphene (SLG). These two kinds of G-FETs are used
for transport measurement and capacitance measurement respectively. The electronic
properties of graphene have been investigated through measurements of the mobilities,
quantum Hall effects, Shubnikov-de-Haas oscillations and quantum capacitance of these
G-FETs.
Properties of graphene affected by resonant impurities and other different kinds of
impurities are first investigated. We have successfully introduced silver adatoms to graphene
as resonant impurities and observed the induced midgap states. In order to have a clearer
picture of resonant impurities, it is very necessary to minimize or even exclude the effects that
come from the induced electron-hole puddles and charged impurities by the substrate SiO
2
and the dielectric layers of Y
2O
3 used for the G-FET devices. Thus h-BN is introduced
since h-BN can largely improve the performance of the G-FETs and reflect the intrinsic
graphene’s electronic properties. Meanwhile, the technique of transferring h-BN onto
graphene opens the possibility to fabricate more complex 3-dimensional structures using
2-dimensional materials, which is a very hot topic recently in the field of 2D material
research.
I have independently developed three different approaches to fabricate single-layer
graphene-hexagonal boron nitride (SLG/h-BN ) structure, namely the wet-transfer approach,
the direct-transfer approach and the dry-transfer approach. Through transferring, I fabricated
transport G-FETs using h-BN as substrates and capacitance G-FETs using h-BN as the top-gate insulators. Pronounced improvement is observed in the performance of both transport
G-FETs and capacitance G-FETs. From the transport measurement of the transferred G-FETs,
the mobility of graphene is prominently enhanced compared to that of SLG/SiO
2 samples.
From the capacitance measurement of the transferred G-FETs, Landau level quantization is
observed clearly. Comparing to the capacitance G-FETs using other top-gate insulator
materials such as Y
2O
3 and Al
2O
3, Landau level quantization is normally suppressed by the
insulator-induced electron-hole puddles and charged impurities. The improvement in the
performance of transferred G-FETs implies that h-BN introduces less electron-hole
puddles and charged impurities to graphene in comparison with other materials such as SiO
2, Y
2O
3 and Al
2O
3 . Consequently, it is a good material for the fabrication of future graphene electronics.
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