THESIS
2014
Abstract
With development of nano-fabrication technology, feature size and dimension of
microelectronics are approaching nanoscale. A phenomenon of this size-shrinking trend is
that the properties of interfaces between contacting materials are becoming dominant factors
affecting performance of microelectronics. Researchers have devoted countless efforts to
investigate properties of materials at nanoscale, but knowledge about the interfaces is still
insufficient. Graphene is considered as one of the miracle materials for next generation
microelectronics due to its two-dimensional nature. The extraordinary high thermal
conductivity and electron mobility of graphene attract researchers to integrate graphene into
microelectronic devices. However, since graphene is just an atomic structure of...[
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With development of nano-fabrication technology, feature size and dimension of
microelectronics are approaching nanoscale. A phenomenon of this size-shrinking trend is
that the properties of interfaces between contacting materials are becoming dominant factors
affecting performance of microelectronics. Researchers have devoted countless efforts to
investigate properties of materials at nanoscale, but knowledge about the interfaces is still
insufficient. Graphene is considered as one of the miracle materials for next generation
microelectronics due to its two-dimensional nature. The extraordinary high thermal
conductivity and electron mobility of graphene attract researchers to integrate graphene into
microelectronic devices. However, since graphene is just an atomic structure of one or a few
atom layers, the interfaces between graphene and another kind of material strongly influence
the performance of graphene based devices. This research selects thermal boundary resistance
of graphene interfaces as the topic, which is very important for the thermal management in
graphene microelectronics and even for the feasibility evaluation for other potential graphene
applications. By the implementation of 3ω method, thermal boundary resistance, which is the
basic index to evaluate thermal transport of interfaces, of several kinds of graphene interfaces
is characterized, to evaluate thermal transport of the interfaces. The effects of interfacial
interaction on the thermal boundary resistance are further explored. The formation of well-adhesive
interfaces is of great importance to realize graphene microelectronics. On the other
hand, covalent bonds between the carbon atoms of graphene and the atoms of another
contacting material assist the heat transfer across interfaces.
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