Single mode rib-beam micro-mechanical movable integrated optical waveguide and the integration issues using conventional I.C. and surface micro-machining fabrication technology
by Stephen Y.S. Sin
xii, 77 leaves : ill. ; 30 cm
In this project, single mode movable integrted optical waveguides on SOI wafer are demonstrated for the first time. This is achieved using a silicon cantilever beam waveguide structure in rib-beam form. The single mode properties and the wavegudie loss are characterised experimentally.
Effective Index Method (EIM) and Beam Propagation Method (BPM) are employed to design and simulate the guided wave propagation characteristics.
A self-aligned fabrication process for the integration of single mode optical fiber with the SO1 waveguide devices using V-groove technology is designed and tested.
Permanent URL for this record: https://lbezone.hkust.edu.hk/bib/b484320
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