In this work, the deposition of pure crystalline diamonds by excimer laser photoablation of poly(methy1 methacrylate) PMMA is reported for the first time. So far no report has been published on fabricating periodic nano-structures as seeding for depositing diamond. This seeding technique makes use of the periodic lines fabricated on Si substrate and then deposit crystalIine diamond from plumes generated by an ArF excimer laser photoablation of PMMA in the presence of reactive species. Other techniques of surface pretreatment such as Reactive Ion Etching (RIE) of Si substrate with polymer coating was investigated....[ Read more ]

In this work, the deposition of pure crystalline diamonds by excimer laser photoablation of poly(methy1 methacrylate) PMMA is reported for the first time. So far no report has been published on fabricating periodic nano-structures as seeding for depositing diamond. This seeding technique makes use of the periodic lines fabricated on Si substrate and then deposit crystalIine diamond from plumes generated by an ArF excimer laser photoablation of PMMA in the presence of reactive species. Other techniques of surface pretreatment such as Reactive Ion Etching (RIE) of Si substrate with polymer coating was investigated.

In addition, RIE pretreated Si surface was exposed to high flux of hydrogen ions acting as surfactants for deposition. This technique has improved the quality of diamond dramatically. The results have been examined by scanning electron microscopy (SEM), Micro-Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), Auger Electron Spectroscopy (AES), atomic force microscopy (AFM). Surface morphology, as determined by AFM and SEM show that microcrystalline diamond grown in oxygen with nanostructures has smooth surface in very specific conditions. Three-folded pyramidal or hexagonal diamond can be deposited by this method. Micro-Raman spectroscopy indicates that the deposition is predominantly composed of diamond. The characteristic peak at 1332 cm^-1 with full width at half maximum of cn. 1.2 ~ 15 cm^-1 demonstrates diamond deposited has high quality.