The continuous progress of micromachining technology has led to a growing interest in MicroElectroMechanical System (MEMS) for applications ranging from simple microsensors and microactuators to sophisticated microsystems. The characteristic length scale of these microdevices will be of the order of sub-microns so that the gas flow in this environment is within the rarefied gas (RG) regime. In this PhD work, the mass/momentum/energy transport of the monatomic gases along the microchannel and the dispersion/attenuation of 1-D ultrasound propagation (plane wave) of RG are investigated by using the Discrete Enskog-Boltzmann approaches....[ Read more ]

The continuous progress of micromachining technology has led to a growing interest in MicroElectroMechanical System (MEMS) for applications ranging from simple microsensors and microactuators to sophisticated microsystems. The characteristic length scale of these microdevices will be of the order of sub-microns so that the gas flow in this environment is within the rarefied gas (RG) regime. In this PhD work, the mass/momentum/energy transport of the monatomic gases along the microchannel and the dispersion/attenuation of 1-D ultrasound propagation (plane wave) of RG are investigated by using the Discrete Enskog-Boltzmann approaches.

We applied the 4-velocity coplanar model to plane Poiseuille flow of RG in microchannels. Firstly we reported a steady-state solution for this flow with a final-stage uniform density distribution. Then, we modified the model by introducing a density ratio to accomodate the density variations along the microchannel and to include the grazing-collision effects. We also borrowed the idea from the Extended Irreversible/Reversible Thermodynamics to derive the pressure-gradient for the dimensional velocity field.

Our results show the Knudsen minimum of the non-dimensional volume flow rate for Knudsen number (Kn) around 1.5. Using the macroscopic velocity fields, with Cercignani's comments for the "Kinetic Temperature", we can calculate the related temperature distribution across the microchannel.

We also checked the thermodynamic or equilibrium properties of 4-, 6-, and 8-velocity models, by calculating the dispersion relation of 1-D plane ultrasound wave propagation in the RG regime which has large Kn of O(1). The results (after comparison with the measurements) confirmed that the 4-velocity model is the most suitable model for our applications.