THESIS
2013
xvi, 112 pages : illustrations ; 30 cm
Abstract
To obtain a high signal strength, fast reading-writing speed, and low energy consuming in
ferroelectric random access memory (FeRAM) devices, it is of vital importance to enhance the
remnant polarization (Pr) and to reduce the coercive field (Ec) simultaneously in polycrystalline
ferroelectric (FE) thin films that dominate the FeRAM market due to low cost.
The PhD research developed a cheap and easy technique of thermomechanical treatment
(TMT), which is able to produce nanotwins, as shown by the images of high resolution
transmission electron microscopy and the patterns of electron nanobeam diffraction, and
meanwhile modulate the residual stress of polycrystalline FE thin films. As a result, the
measured remnant polarization (Pr) is enhanced and meanwhile the measured coercive...[
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To obtain a high signal strength, fast reading-writing speed, and low energy consuming in
ferroelectric random access memory (FeRAM) devices, it is of vital importance to enhance the
remnant polarization (Pr) and to reduce the coercive field (Ec) simultaneously in polycrystalline
ferroelectric (FE) thin films that dominate the FeRAM market due to low cost.
The PhD research developed a cheap and easy technique of thermomechanical treatment
(TMT), which is able to produce nanotwins, as shown by the images of high resolution
transmission electron microscopy and the patterns of electron nanobeam diffraction, and
meanwhile modulate the residual stress of polycrystalline FE thin films. As a result, the
measured remnant polarization (Pr) is enhanced and meanwhile the measured coercive field (Ec)
is reduced. The enhanced Pr is attributed to the reduced residual tensile stress, while the reduced
Ec is owing to the nanotwin network introduced by TMT. The developed TMT technique is
superior over the interfacial engineering that is validated only for epitaxial single crystalline
films. The twinned structures provide more domain nucleation sites, thereby making the
polarization switching easier and thus lowering the coercive field.
Changing the TMT temperature, the TMT technique can induce the cubic to hexagonal
phase transformation in the barium titanate films. The hexagonal phase was observed by high
resolution transmission electron microscopy. The hexagonal phase is no-ferroelectric and has a
plate shape. The mechanisms of the TMT induced nanotwins and cubic to hexagonal phase
transformation have been comprehensively studied. The hexagonal phase plates embedded in
ferroelectric phase lead to double hysteresis loops of polarization versus electric field. The
domain mechanism of the double hysteresis loop is also discussed in this PhD study.
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