HKUST Electronic Theses Micromachined thermal expansion-based angular motion sensor with CMOS MEMS technology
by Luo Huahuang
THESIS
2022
Ph.D. Mechanical and Aerospace Engineering
1 online resource (xviii, 157 pages) : illustrations (some color)
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Not presently available for public access at author's request
Abstract
*CONFIDENTIAL*
Permanent URL for this record: https://lbezone.hkust.edu.hk/bib/991013088359703412
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