Laser micromachining systems are applied to various applications, such as surface modification, microfluidics, material removal and subtractive processing, and material addictive material manufacturing. Although various laser manufacturing systems have been created, many topics, especially using ultra-fast laser systems, are still not explored or need improvement. We set up a dual-channel (one with faster speed while another with better performance) picosecond (12ps) laser machining system for micromanufacturing. The system supports planar machining and rotary machining. Besides, we put up a scalable, flexible, and modularized architecture based on CNC Code for any computer numerical control system, such as laser direct writing, 3D printing, focused ion beam, etc. This architecture take...[ Read more ]

Laser micromachining systems are applied to various applications, such as surface modification, microfluidics, material removal and subtractive processing, and material addictive material manufacturing. Although various laser manufacturing systems have been created, many topics, especially using ultra-fast laser systems, are still not explored or need improvement. We set up a dual-channel (one with faster speed while another with better performance) picosecond (12ps) laser machining system for micromanufacturing. The system supports planar machining and rotary machining. Besides, we put up a scalable, flexible, and modularized architecture based on CNC Code for any computer numerical control system, such as laser direct writing, 3D printing, focused ion beam, etc. This architecture takes full advantage of G Code ecology and decouples code for hardware and software, greatly reducing the developing time for new machines.

We completed the whole system, from hardware and cable connection to software. In addition, this research systematically summarized the methods for precision, repeatability, calibration, and correction. Finally, we conducted some experiments using this system, proving its practicality.